Witrynaimpheat-ii. 高温搬送の信頼性とスループットをimpheatからさらに進化させた高温イオン注入装置. 特長. 業界最高の生産性を持つ高温イオン注入装置で、sicパワーデバイス向けアルミニウム(ai)注入が可能. 室 … WitrynaThe beamline concept of IMPHEAT is the same as Nissin's ion implanter EXCEED 9600A for silicon device manufacturing. To meet the implantation process for SiC device fabrication, a new type ion ...
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Witryna11 sty 2011 · High productivity medium current ion implanter “IMPHEAT” was developed for a commercial silicon carbide (SiC) device production. The beamline concept of IMPHEAT is the same as Nissin’s ion implanter EXCEED 9600A for silicon device manufacturing. To meet the implantation process for SiC device fabrication, a … WitrynaAffiliate bases are equipped with Nissin Electric Fine Coating systems (the M-series) that can provide customers mainly in Asia and other regions with a wide range of coating services. The following our group companies offer contract coating services. Our superior equipment, coating technology and know-how accumulated over years of experience ... meriden housing birmingham
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WitrynaIMPHEAT-II. Ion species:Al+, P+, As+, B+, N+, and more Dose range:5E10–1E17 Energy:5keV–960keV RT–500°C substrate heating Witryna7 lis 2012 · We developed the high temperature ion implanter “IMPHEAT” for mass production of 6 inch SiC wafers. IHC (Indirectly Heated Cathode) ion source was … WitrynaNissin Ion Equipment ion implanters (IMPHEAT ®) are highly reliable and can precisely implant a wide variety of dopants into SiC wafers using our leading-edge technologies, including controlled high-temperature implants with precise beam angle control. Ion implanters have made it possible to dope silicon carbide and enhance its material ... meriden ks flower shop